Precision Cleaning Benefits
Inadequate cleaning leaves undesirable particulate or chemical residues, which can cause device malfunctions or even complete system failures. Proper precision cleaning increase system uptime, extend the life of vacuum system components, increase system yields, and reduce operating costs.
TMPI has over 50 years of experience in the development and application of Precision Cleaning for use in vacuum environments, and has successfully processed several million parts comprised of a wide variety of materials.
Applications for Precision Cleaning
Chemical and mechanical precision cleaning is useful for both new and used equipment. A sample list of components would include systems, shields, platens, stainless liners, shutters, process chamber doors, transfer plates, stainless steel bell jars, roughing lines, process chambers, CVD and PVD parts, valves, ion sources, diffusion pumps and wave guides.
Knowledgeable users employ Precision Cleaning to:
- Optimize the amount of substrate material removed in cleaning, thereby maintaining dimensional integrity and increasing the service life of parts.
- Consider and develop alternate strategies for removing deposits that are extremely resistant to chemical and/or mechanical cleaning.
- Change the surface texture of materials so as to enhance the desirable adhesion of deposits.
- Improve the cosmetic appearance of parts, which can reduce concern about the existence of undesirable residues.
Consider precision cleaning to ensure proper function and increased service life for any of the following:
- Evaporators
- Sputter systems
- Vacuum systems
- Process equipment
- Ion implanters
- Thin film deposition
- Semiconductor processing
- Wafer fabrication
- Medical devices
- Other process equipment
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TMPI
3118 Depot Road; Hayward CA 94545
Phone: 510-786-0680 Fax: 510-786-0178
e-mail: info@tmpi-quickclean.com
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